Browsing by Subject sputter deposition

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Issue DateTitleAuthor(s)
25-Mar-2019The impact of O-2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin filmsVAHL, Alexander ; DITTMANN, Josephine ; JETTER, Justin ; VEZIROGLU, Salih ; SHREE, Sindu ; ABABII, Nicolai ; LUPAN, Oleg ; AKTAS, Oral Cenk ; STRUNSKUS, Thomas ; QUANDT, Eckhard ; ADELUNG, Rainer ; SHARMA, Smita ; FAUPEL, Franz