Browsing by Subject sputter deposition
Showing results 1 to 1 of 1
Issue Date | Title | Author(s) |
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25-Mar-2019 | The impact of O-2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin films | VAHL, Alexander ; DITTMANN, Josephine ; JETTER, Justin ; VEZIROGLU, Salih ; SHREE, Sindu ; ABABII, Nicolai ; LUPAN, Oleg ; AKTAS, Oral Cenk ; STRUNSKUS, Thomas ; QUANDT, Eckhard ; ADELUNG, Rainer ; SHARMA, Smita ; FAUPEL, Franz |