Fabrication of β-Ga2O3 large scale nanomembranes

Abstract

Large-sized nanomembranes based on 2D semiconductor materials have gained significant attention for their fascinating properties in various applications. In this work, we demonstrate the fabrication of ultrathin β-Ga2O3 membranes with a thickness of just several tens of nanometers. The technological route includes the fabrication of GaN membranes using the Surface Charge Lithography approach and subsequent thermal treatment in air at 900 ◦C. The as-grown GaN membranes were completely transformed into β-Ga2O3 as disclosed by electron microcopy and XPS analysis. Thus, the combination of the SCL and thermal treatment under ambient conditions presents a cost-efficient approach for obtaining large-sized ultrathin membranes of β-Ga2O3 – a promising material for nano-electronics and photonics.