Please use this identifier to cite or link to this item: http://cris.utm.md/handle/5014/1491
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dc.contributor.authorLUPAN, Olegen_US
dc.contributor.authorABABII, Nicolaien_US
dc.contributor.authorTROFIM, Viorelen_US
dc.date.accessioned2022-11-11T12:52:48Z-
dc.date.available2022-11-11T12:52:48Z-
dc.date.issued2022-
dc.identifier.urihttp://cris.utm.md/handle/5014/1491-
dc.description.abstractProcedeul, conform invenției, include depunerea peliculei nanostructurate de oxid de cupru pe un suport din sticlă prin metoda sintezei chimice din soluție, tratarea termică rapidă la temperatura 750 oC timp de 60 s, depunerea peliculei de Al2O3 prin evaporarea termică în vid a tri-izopropilatului de aluminiu Al(C3H7O)3, tratarea termică în aer a structurii obținute la temperatura de 620 oC timp de 40 min, și depunerea contactelor de Cr-Au în formă de meandru.en_US
dc.subjectPelicolă nanostructurată, oxid de cupru, tratare termicăen_US
dc.titleProcedeu de obținere a senzorului de hidrogen stabil la umiditateen_US
dc.typeAwarden_US
dc.relation.conferenceProInvent 2022en_US
item.grantfulltextopen-
item.fulltextWith Fulltext-
crisitem.author.deptDepartment of Microelectronics and Biomedical Engineering-
crisitem.author.deptDepartment of Microelectronics and Biomedical Engineering-
crisitem.author.deptDepartment of Microelectronics and Biomedical Engineering-
crisitem.author.orcid0000-0002-7913-9712-
crisitem.author.orcid0000-0001-5046-8611-
crisitem.author.orcid0000-0002-6620-3076-
crisitem.author.parentorgFaculty of Computers, Informatics and Microelectronics-
crisitem.author.parentorgFaculty of Computers, Informatics and Microelectronics-
crisitem.author.parentorgFaculty of Computers, Informatics and Microelectronics-
Appears in Collections:01-Gold Medals
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