СOMBINATION THERMOSTATED VACUUM GAUGE

Abstract

To expand the measured pressure range, a CVG-3 combination vacuum gauge prototype has been developed and constructed, it includes an electronic controller and a specially designed TTD-2 deformation–thermocouple combination transducer. The transducer includes thermoelectric and deformation sensors. To decrease the pressure measurement error depending on changes in ambient temperature, the sensors are thermostated. Each sensor has an individual thermostat consisting of an ohmic heater and a platinum thermistor localized near the sensitive element. The use of the thermocouple and tensometric principles of pressure measurement has made it possible to expand the measured pressure range from deep vacuum to atmospheric pressure, while maintaining high measurement accuracy.