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Please use this identifier to cite or link to this item:
http://cris.utm.md/handle/5014/535| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | ABABII, Nicolai | en_US |
| dc.contributor.author | TROFIM, Viorel | en_US |
| dc.contributor.author | LUPAN, Oleg | en_US |
| dc.date.accessioned | 2020-06-02T18:37:40Z | - |
| dc.date.available | 2020-06-02T18:37:40Z | - |
| dc.date.issued | 2020-05-04 | - |
| dc.identifier.citation | Ababii, Nicolai, Trofim, Viorel, & Lupan, Oleg. (2020). MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS. Journal of Engineering Science, XXVIII (2), 52–61. http://doi.org/10.5281/zenodo.3784343 | en_US |
| dc.identifier.issn | 2587-3474 | - |
| dc.identifier.issn | 2587-3482 | - |
| dc.identifier.uri | http://cris.utm.md/handle/5014/535 | - |
| dc.description.abstract | This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that microheaters made on glass, ceramic and SiO2/Si substrates can survive up to a temperature of ~400 °C, which allows their integration for applications in gas sensing devices to maintain necessary operating temperature. | en_US |
| dc.language.iso | en | en_US |
| dc.relation.ispartof | Journal of Engineering Science: XXVIII (2) | en_US |
| dc.subject | microheater | en_US |
| dc.subject | copper oxide | en_US |
| dc.subject | gas sensors | en_US |
| dc.subject | glass substrate | en_US |
| dc.subject | semiconductors | en_US |
| dc.title | MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS | en_US |
| dc.type | Article | en_US |
| dc.identifier.doi | 10.5281/zenodo.3784343 | - |
| item.grantfulltext | open | - |
| item.languageiso639-1 | other | - |
| item.fulltext | With Fulltext | - |
| crisitem.author.dept | Department of Microelectronics and Biomedical Engineering | - |
| crisitem.author.dept | Department of Microelectronics and Biomedical Engineering | - |
| crisitem.author.dept | Department of Microelectronics and Biomedical Engineering | - |
| crisitem.author.orcid | 0000-0001-5046-8611 | - |
| crisitem.author.orcid | 0000-0002-6620-3076 | - |
| crisitem.author.orcid | 0000-0002-7913-9712 | - |
| crisitem.author.parentorg | Faculty of Computers, Informatics and Microelectronics | - |
| crisitem.author.parentorg | Faculty of Computers, Informatics and Microelectronics | - |
| crisitem.author.parentorg | Faculty of Computers, Informatics and Microelectronics | - |
| Appears in Collections: | Journal Articles | |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| JES-2020-2-pp_52-61.pdf | 1.35 MB | Adobe PDF | View/Open |
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