CRIS of TUM
Current Research Information System (CRIS) of the Technical University of Moldova (TUM) is an open access system gathering information and digital material relating to the various research and innovation entities and activities of TUM: researchers, research units, publications, patents, thesis, awards, events, equipment, services and other.
Please use this identifier to cite or link to this item:
http://cris.utm.md/handle/5014/1494| Title: | Process for obtaining several non-connected pore networks in a semiconductor wafer for fluidic applications | Authors: | MONAICO, Eduard V. URSAKI, Veaceslav TIGINYANU, Ion |
Keywords: | Semiconductors, network, secondary pores | Issue Date: | 2022 | Conference: | Inventica 2022 | Abstract: | Two pore networks were produced at anodization of the surface of semiconductor wafer covered with a mask contains holes: (i) a network of primary pores, which propagate under the mask in a direction parallel to the surface of the sample and perpendicular to the edge of the mask; (ii) a network of secondary pores, which initially propagate in the hole of the mask in radial directions and subsequently change their direction of propagation in the direction of the primary pores. |
URI: | http://cris.utm.md/handle/5014/1494 |
| Appears in Collections: | 02-Silver Medals |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Inventica_2022_Silver_Monaico E..pdf | 1.54 MB | Adobe PDF | View/Open |
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.