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Title: | Manufacturing highly conductive ceramic targets and thin films of ZnO | Authors: | COLIBABA, Gleb FEDOROV, Vladimir RUSNAC, Dumitru GRABCO, Daria MONAICO, Eduard PETRENKO, Peter ROTARU, C. |
Issue Date: | 2019 | Source: | COLIBABA, Gleb; FEDOROV, Vladimir; RUSNAC, Dumitru; GRABCO, Daria; MONAICO, Elena; PETRENKO, Peter; ROTARU, C.. Manufacturing highly conductive ceramic targets and thin films of ZnO. In: NANO-2019: Limits of Nanoscience and Nanotechnologies. 24-27 septembrie 2019, Chişinău. Chișinău, Republica Moldova: 2019, p. 78. | Project: | 15.817.02.29A. Multifunctional nanomaterials and nanoelectronic devices based on nitrides, oxides and chalcogenides for biomedicine / Nanomateriale multifuncţionale şi dispozitive nanoelectronice în bază de nitruri, oxizi şi calcogenuri pentru biomedicină | Conference: | NANO-2019: Limits of Nanoscience and Nanotechnologies | Abstract: | The present investigation addresses a novel approach for sintering ZnO ceramics by means of chemical vapor transport (CVT) using compound transport agents. The typical size of obtained ZnO ceramics was 25 mm in diameter and 1 mm thickness. The sintering ZnO ceramics at the use of HCl+H2+C, is the most perspective and effective method, which has the following advantages: the low sintering temperature of 1070 °C, 99% of the initial diameter, 80% of single crystal hardness, 90-95% of ZnO density, the low resistivity of 0.025 W×cm, free from powder pressing, free from attachment effect and contamination. ZnO targets with resistivity of 2×10–3 W×cm, additionally doped by donor impurities, can be successfully sintered at low temperatures. ZnO thin films (~ 400 nm), obtained by DC magnetron sputtering, have the following parameters: the optical transparency is about 90% in the visible range, resistivity of 4×10-4 W×cm, free electron concentration of 3×1021 cm-3, and hall mobility of 6 cm2/Vs. The proposed technology simplifies and reduces the price of manufacturing uniformly doped ZnO ceramic targets, thin films and optoelectronic devices based on ZnO. |
URI: | https://ibn.idsi.md/ro/vizualizare_articol/92978 http://cris.utm.md/handle/5014/215 |
Appears in Collections: | Conference Abstracts |
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NANO_2019_pp78.pdf | 217.42 kB | Adobe PDF | View/Open |
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