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http://cris.utm.md/handle/5014/535| Title: | MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS | Authors: | ABABII, Nicolai TROFIM, Viorel LUPAN, Oleg |
Keywords: | microheater;copper oxide;gas sensors;glass substrate;semiconductors | Issue Date: | 4-May-2020 | Source: | Ababii, Nicolai, Trofim, Viorel, & Lupan, Oleg. (2020). MICROHEATERS FOR COPPER OXIDE-BASED GAS SENSORS. Journal of Engineering Science, XXVIII (2), 52–61. http://doi.org/10.5281/zenodo.3784343 | Journal: | Journal of Engineering Science: XXVIII (2) | Abstract: | This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that microheaters made on glass, ceramic and SiO2/Si substrates can survive up to a temperature of ~400 °C, which allows their integration for applications in gas sensing devices to maintain necessary operating temperature. |
URI: | http://cris.utm.md/handle/5014/535 | ISSN: | 2587-3474 2587-3482 |
DOI: | 10.5281/zenodo.3784343 |
| Appears in Collections: | Journal Articles |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| JES-2020-2-pp_52-61.pdf | 1.35 MB | Adobe PDF | View/Open |
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